A STUDY ON CRYSTALLINE MORPHOLOGY OF AN AlN THICK FILM GROWN ON THE TRENCH-PARTERNED -Al2O3 USING X-RAY DIFRACTION
Corresponding Author(s) : Dinh Thanh Khan
UED Journal of Social Sciences, Humanities and Education,
Vol. 7 No. 5 (2017): UED JOURNAL OF SOCIAL SCIENCES, HUMANITIES AND EDUCATION
The crystalline morphology such as domain texturing, lattice tilting in a thick aluminum nitride (AlN) ﬁlm grown on a trench-patterned α-Al2O3 template was investigated using X-ray diffraction measurements. The results clearly demonstrated that the trench-patterned template has a strong inﬂuence on the crystalline morphology in the thick AlN ﬁlm. The crystalline morphology is anisotropic between the and directions. The AlN film contains several crystal domains, arranged along the direction and tilted toward each other in this direction but parallel to each other in the direction. These results can be attributed to the inﬂuence of the growth mechanism of the AlN film on the trench-patterned α-Al2O3 template and the elastic relaxation of strain along the growth direction.
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